http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101767080-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2014-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101767080-B1 |
| titleOfInvention | Hardmask composition, and method of forming patterns using the hardmask composition |
| abstract | A polymer comprising a structural unit represented by the following formula (1) and a structural unit represented by the following formula (2), and a solvent. [Chemical Formula 1] (2) In the above Formulas 1 and 2, Ar 1 , Ar 2 , M 1 and M 2 are as defined in the specification. |
| priorityDate | 2014-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 53.