http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101762080-B1

Outgoing Links

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classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7833
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B10-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823892
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-092
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
filingDate 2016-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101762080-B1
titleOfInvention Semiconductor device
abstract The present invention suppresses the generation of voids in the element isolation insulating film. A semiconductor device includes a substrate, a first active region extending in a first direction and having a first region of a first width and a second region of a second width larger than the first width, the first region being formed in the substrate, A second active region formed in the substrate and extending in parallel with the second region of the first active region; and a second active region formed in the substrate and defining a first active region and a second active region, Wherein the second region or the second active region of the first active region has a concave shape that is concave toward a second direction intersecting with the first direction when viewed in a plan view.
priorityDate 2013-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009189198-A1
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Total number of triples: 27.