http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101759891-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31608 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08 |
| filingDate | 2015-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101759891-B1 |
| titleOfInvention | Silicon precursor and manufacturing method of silicon-containing thin film using thereof |
| abstract | The present invention relates to a novel silicon precursor and a method for producing a silicon-containing thin film using the same, and more particularly, to a silicon precursor having high volatility and thermal stability, and a silicon precursor using the same, And a method of manufacturing a silicon-containing thin film having improved current characteristics. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020072768-A1 |
| priorityDate | 2015-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 87.