http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101757524-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67745 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6776 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 2013-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101757524-B1 |
| titleOfInvention | Substrate conveyance method, and substrate conveyance device |
| abstract | It is possible to cope with various processing conditions and the change precisely and efficiently, and the overall throughput is improved by operating the transfer arm device efficiently in accordance with processing conditions even during cleaning. When the first wafer is loaded in the load lock chamber, the type of the transfer sequence for operating the transfer arm device for each step count of the transfer arm device operable during the cleaning process is selected in accordance with the process conditions of the wafer, and a plurality of operation patterns are selected and combined Scheduling. Then, the conveyance arm device is controlled in accordance with the scheduled conveyance sequence to carry out conveyance control of the substrate. |
| priorityDate | 2012-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.