http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101754418-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1368 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1362 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate | 2010-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101754418-B1 |
| titleOfInvention | Manufacturing method of an array substrate for liquid crystal display |
| abstract | (A) forming a gate electrode on a substrate; (b) forming a gate insulating layer on the substrate including the gate electrode; (c) forming a semiconductor layer on the gate insulating layer; (d) forming a source / drain electrode on the semiconductor layer; And (e) forming a pixel electrode connected to the drain electrode, the method comprising the steps of: Wherein at least one of the steps (a), (d), and (e) forms a metal film including at least one film selected from a copper-based metal film, a molybdenum-based metal film, and an indium-based oxide film, To form respective electrodes; Wherein the etchant composition comprises A) from 2 to 10% by weight of ammonium hydroxide (Ammonium Oxalate), from 0.1 to 10% by weight of hydrogen peroxide (H 2 O 2 ), from 0.01 to 5% D) 0.01 to 5.0% by weight of a water-soluble cyclic amine compound, and E) water in a remaining amount. |
| priorityDate | 2010-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.