http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101735838-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1818 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0275 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2010-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101735838-B1 |
| titleOfInvention | Positive resist composition, method of forming resist pattern and polymeric compound |
| abstract | 1. A positive resist composition comprising a base component (A ') which increases solubility in an alkali developer by the action of an acid and which generates an acid upon exposure, wherein the base component (A' (A1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group, a constituent unit (a0-1) represented by the following formula (a0-1) Wherein R 1 is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a halogenated alkyl group having 1 to 5 carbon atoms, R 2 is a divalent linking group, R 3 is a cyclic group containing -SO 2 - in the ring skeleton.] [Chemical Formula 1] |
| priorityDate | 2010-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 326.