| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B5-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate |
2015-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101735372-B1 |
| titleOfInvention |
composition comprising boron-containing compound, boron-containing thin film and method for manufacturing boron-containing thin film |
| abstract |
The present invention relates to a composition containing a boron-containing compound which can be used as a precursor for forming various boron-containing thin films, a boron-containing thin film prepared using the same, and a process for producing a boron-containing thin film using the same. Has high volatility and thermal stability, and can form a high quality boron-containing thin film. |
| priorityDate |
2014-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |