http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101735121-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2011-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101735121-B1 |
| titleOfInvention | Chemically amplified positive-type photoresist composition thick film, and method for producing thick film resist pattern |
| abstract | (assignment) A chemically amplified positive photoresist composition for a thick film capable of forming a thick film resist pattern having high resolution and dimensional controllability and having good rectangularity, and a method for producing a thick film resist pattern using such a composition. (Solution) The photoresist composition of the present invention comprises an acid generator (A) containing a cation portion represented by the general formula (a1) and an anion portion represented by the general formula (a2), and an acid generator And contains the resin (B). Herein, R 1a to R 3a represent an alkoxy group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkyloxycarbonyl group and the like. R 4a to R 7a each represent a fluorine atom or a phenyl group, and a part or all of the hydrogen atoms of the phenyl group may be substituted with at least one member selected from the group consisting of a fluorine atom and a trifluoromethyl group. |
| priorityDate | 2010-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 350.