http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101732191-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2011-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101732191-B1 |
| titleOfInvention | Polishing composition and polishing process using the same |
| abstract | The present invention provides a polishing composition capable of improving the flatness of an object to be polished after polishing and further capable of reducing surface defects caused in the object by polishing. The polishing composition of the present invention contains an oxidizing agent, an anticorrosive agent, and a surfactant comprising a compound represented by the general formula (1). 1 to 3 of R 1 to R 5 in the general formula (1) are an alkyl group, an alkynyl group, an alkenyl group, an aryl group or an arylalkylene group, one is a hydrogen atom or an alkyl group having 1 to 9 carbon atoms, OR 6 is a random or block combination of oxyethylene, oxypropylene or oxyethylene and oxypropylene, n is an integer of 1 or more, and X is an OSO 3 - group, an OPO 3 2 - group or an OH group. ≪ Formula 1 > |
| priorityDate | 2010-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 356.