| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e5fb4e8398929381a1c66f4802b03d7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12041 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-02 |
| filingDate |
2016-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_122e2a039e37d78d2a2ba0138e561e85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77827bba557d5ddb72c337e9d8c26323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b06b8bd1aff98f9fcbf643e1537b0bda |
| publicationDate |
2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101720895-B1 |
| titleOfInvention |
Nanoimprinting method |
| abstract |
The present invention discloses a nanoimprinting method. A nanoimprinting method according to an embodiment of the present invention includes: plasma processing a surface of a substrate; Forming an adhesive primer layer comprising a polyimide and a silane compound on the plasma-treated substrate; Forming a resist layer comprising polyimide on the adhesive primer layer; And forming the resist layer as a nanoimprint layer using a nanoimprint mold. According to the embodiment of the present invention, the resist layer can be easily separated from the nanoimprint mold by forming an adhesive primer layer between the substrate and the resist layer. |
| priorityDate |
2016-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |