http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101720388-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-147 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate | 2014-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101720388-B1 |
| titleOfInvention | Method for producing resist composition |
| abstract | It is an object of the present invention to provide a process for producing a resist composition capable of producing a resist composition having reduced coating defects. A method of manufacturing a resist composition for use in a semiconductor device manufacturing process, comprising the steps of: cleaning the apparatus for manufacturing a resist composition with a cleaning liquid; removing the cleaning liquid from the manufacturing apparatus; spinning the coating liquid onto an evaluation substrate; Cm < 2 > or less of the defect density in a defect of a size of 100 nm or more before and after the resist is removed, and then the resist composition is produced by the production apparatus. |
| priorityDate | 2013-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.