http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101716289-B1

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1811
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1809
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate 2012-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101716289-B1
titleOfInvention Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device
abstract The present invention relates to a resin composition comprising (i) a resin (A) having a repeating unit having a group capable of generating a polar group and a repeating unit having an aromatic group decomposed by the action of an acid, a compound (B) generating an acid by irradiation with an actinic ray or radiation, , And a solvent (C) to form a film; (ii) exposing the film; And (iii) a step of developing the exposed film using a developing solution containing an organic solvent to form a negative tone pattern, wherein the resin (A) is a resin having a repeating unit having a naphthyl group or the like And / or the sensitizing actinic radiation-sensitive or radiation-sensitive resin composition contains a compound (D) having a naphthalene ring or the like.
priorityDate 2011-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011138111-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21972
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548292
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466871718
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415867324
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420453144
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136906
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8416
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31289
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7958
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421063912
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7020
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523795
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415993545
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415729617
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550066
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415730383
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13235
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421170388
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID702
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451110572
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569655
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7018
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593324
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538410
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID182180
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3015987
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474318
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3776
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31288
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526383
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415746057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419761390
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416114948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415834440
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID641003
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53627862
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31276
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13663
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22646129
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453054575
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512377
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9903
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394891
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12178
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8299
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14227
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450330164
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415709664
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420167136
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1248527
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61154
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421322735
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513848
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10295
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520307
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3637755
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424603591
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410760500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410491876
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420348536
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21909474
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415837858
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139145
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411135244
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164088
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID107735
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7094
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7678
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410439394
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450647357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487501
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416050134
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414877336
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414863332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13187
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420120093
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415901393
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID221493
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527088
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62308
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11008049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93034
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544847
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15417
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7910
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414866734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422998190
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453333821
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9834010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414875087
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11614
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450664886
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456554079
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419594273
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9235
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426168337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540783
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862891
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456500829
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458399653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420317239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID247453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31246
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550005
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23190049
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467480089
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757774
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6544
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8093
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8738
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13529
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21977714
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419536857
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7865
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415841400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414863236
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21977711
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449322606
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423390515
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14390089
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138236
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425993961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539362
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457673796
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7095
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420320341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20315
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76958191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467531241
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12348
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420921313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419477666
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158947546
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70300
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393676
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510528
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510529
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9794626
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415792305
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8165
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID524190
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523318
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8035
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456475560
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415842847
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226465
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450893335
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8160
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457834384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531968
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420255378
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22481847
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11515
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420299240
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9233
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID27946
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID524587
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420256063
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415709651
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5363741
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222528
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524931
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID32484
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10232
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414865104
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424597396
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10903
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449991667
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521873
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415838612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456371369
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3715291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393629
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414873999
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22104978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID454
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554492
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426127296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407007010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419562219
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414860879
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548589
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414887309
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140005
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6999002
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID638097
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457834974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92821
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11583
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8190
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466916075
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21971

Total number of triples: 258.