http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101707155-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
filingDate | 2015-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2017-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2017-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101707155-B1 |
titleOfInvention | Stripper composition for removing photoresist and stripping method of photoresist using the same |
abstract | The present invention relates to a composition comprising at least one amine compound; An amide compound in which a linear or branched alkyl group having 1 to 5 carbon atoms is substituted with 1 to 2 nitrogen atoms; Polar organic solvents; Certain triazole-based compounds; And a benzimidazole-based compound, and a stripping method of a photoresist using the stripper composition. |
priorityDate | 2014-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 83.