http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101701152-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-0009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D18-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2009-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101701152-B1 |
| titleOfInvention | Polishing pad comprising nano fiber with protrusion |
| abstract | The present invention relates to a polishing pad containing nanofibers having protrusions, and more particularly to a nanofiber having protrusions and coating layers formed on its surface. And a matrix containing the nanofibers therein. The polishing pad of the present invention can produce a slurry to which an abrasive is not added, so that the incidence of scratches due to agglomeration of the abrasive agent can be remarkably reduced.n n n n Polishing pad, CMP, nanofiber, coating, projection |
| priorityDate | 2009-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 83.