| abstract |
An object of the present invention is to further mineralize the surface of a film made of a polysiloxane-based organic-inorganic hybrid substance whose surface has a hardness higher than that of the inside. In the organic-inorganic hybrid thin film of the present invention, a) a compound of formula (I) R n SiX 4 -n (I) (Wherein R represents an organic group in which a carbon atom is directly bonded to Si, X represents a hydroxyl group or a hydrolysable group, n represents 1 or 2, and when n is 2, each R may be the same or different, and 4 - n) is 2 or more, each X may be the same or different, a condensate of an organosilicon compound represented by the formula b) Organic Polymer Compound Inorganic composite thin film, (I) is formed on the surface of the film, and the concentration of carbon atoms at a depth of 10 nm from the surface is at least 20% or more than the concentration of carbon atoms at a depth of 100 nm from the surface And the O / Si source consumption of 2 nm depth from the surface of the film is 1.8 to 2.5. |