| abstract |
The present invention relates to an antireflective coating composition comprising a dye or chromophore moiety and a polymer having a crosslinking functionality, an optional crosslinking component, and at least one photoactive compound having the formula: W- (L- (G)) p In this formula, W is PAG or Q, PAG is a photoacid generator and Q is a quencher; Each L is a direct bond or a linking group; Each G is independently a G1 or G2, G1 is OH and G2 is OCH = CH 2, and; p is 1 to 12; |