http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101677318-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2013-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2016-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2016-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101677318-B1 |
titleOfInvention | Photosensitive resin composition |
abstract | A method of forming a pattern comprising a photosensitive resin composition capable of forming a pattern having excellent storage stability and excellent in precision at a low exposure dose and a polysiloxane film using the photosensitive resin composition and a method of forming a polysiloxane film formed using the photosensitive resin composition And a pattern formed by the pattern. (A) a photosensitive resin composition comprising at least one member selected from the group consisting of a hydrolyzable silane compound, a hydrolyzate of a hydrolyzable silane compound, and condensates thereof, and (B) a photoacid generator or photoacid generator (C) a compound which generates an imidazole compound of a specific structure by light is added. |
priorityDate | 2012-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 319.