http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101676500-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67745 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 2011-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101676500-B1 |
| titleOfInvention | Method for acquiring data of substrate processing apparatus, and substrate for sensor |
| abstract | An object of the present invention is to efficiently acquire data of each module of a substrate processing apparatus and perform inspection with high precision. Holding a sensor substrate having a sensor coil for supplying power to the sensor unit to the holding member, and subsequently advancing the holding member A step of transferring the sensor substrate to the module, and a step of forming a magnetic field by supplying electric power to the transfer coil moving together with the base, and resonating the transfer coil and the water- A step of supplying electric power to the water-receiving coil from a transmission coil; and a step of acquiring data concerning the module by the sensor unit. |
| priorityDate | 2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.