http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101675388-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66636 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101675388-B1 |
| titleOfInvention | Fabricating method of semiconductor device |
| abstract | The present invention relates to a method of manufacturing a semiconductor device. A method of manufacturing a semiconductor device according to an embodiment of the present invention includes: providing a semiconductor substrate in which a first semiconductor element region and a second semiconductor element region are defined; forming a first gate structure in the first semiconductor element region; Forming a second gate structure in the second semiconductor device region, forming a first trench on either side of the first gate structure, forming a second trench on either side of the second gate structure, Wherein the cross-sectional shape of the first and second trenches cut in a direction parallel to the vertical direction of the first and second gate structures includes forming a first semiconductor pattern and a second semiconductor pattern in the second trench, And have different shapes. |
| priorityDate | 2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.