http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101659725-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D241-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-406 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D241-12 |
| filingDate | 2014-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101659725-B1 |
| titleOfInvention | Volatile dihydropyrazinyl and dihydropyrazine metal complexes |
| abstract | The present invention relates to a composition comprising a dihydropyrazinyl anion capable of coordinating with a wide variety of metals as six electron ligands to yield volatile metal complexes for ALD and CVD deposition. It also relates to a non-deprotonated dihydropyrazine which can be coordinated to the metal as a stabilizing neutral ligand. In one embodiment, the composition is used for direct liquid injection delivery of a metal dihydropyrazine complex precursor to an ALD or CVD fixed chamber for deposition of a metal-containing thin film, such as, for example, a ruthenium or cobalt metal film. |
| priorityDate | 2013-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 96.