http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101658423-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45591 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2013-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101658423-B1 |
| titleOfInvention | Delivery device and method of use thereof |
| abstract | The delivery device includes an inlet port and an outlet port. The delivery device includes an inlet chamber and an outlet chamber, the outlet chamber being located on the opposite side of the inlet chamber and fluidly connected with the inlet chamber through the cone region. The exit chamber includes a maze that allows the vapor of the solid precursor compound to escape through the delivery device through the outlet port while preventing the solid particles of the solid precursor compound contained in the delivery device from escaping the delivery device. |
| priorityDate | 2010-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.