| abstract |
(A) a resin containing a repeating unit which is soluble in an alkali developer during the action of an acid of the general formulas (I), (II) and (III); And (B) a compound which generates a fluorine-containing acid upon irradiation with an actinic ray or radiation. Wherein R 1 represents a hydrogen atom or an optionally substituted methyl group, R 2 represents a halogen atom, an optionally substituted alkyl group, an optionally substituted cycloalkyl group, an optionally substituted aryl group or an optionally substituted aralkyl group And n is an integer of 0 to 5, provided that when n is 2 or more, plural R 2 s may be the same or different.] |