http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101648871-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2009-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101648871-B1 |
| titleOfInvention | Chemically amplified positive resist composition |
| abstract | The present invention provides a chemically amplified positive composition comprising:n n n Resin comprising the structural unit represented by formula (I):n n n n n n n n Wherein R 1 represents a hydrogen atom, a halogen atom, a C 1 -C 4 alkyl group or a C 1 -C 4 perfluoroalkyl group, Z represents a single bond or - (CH 2 ) k -CO-X 4 - X 1 , X 2 , X 3 and X 4 each independently represents an oxygen atom or a sulfur atom; m represents an integer of 1 to 3; and n represents an integer of 0 to 3, Andn n n Acid generator. |
| priorityDate | 2008-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 239.