Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F11-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0084 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-26 |
filingDate |
2008-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2016-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-101644763-B1 |
titleOfInvention |
New antioxidants for post-cmp cleaning formulations |
abstract |
The present invention is directed to a cleaning composition and method for cleaning residues and contaminants after CMP from a microelectronic device having residues and contaminants thereon after chemical mechanical polishing (CMP). The composition highly achieves effective cleaning of residues and contaminants after CMP from the surface of the microelectronic device without damaging the low-k dielectric material or the copper interconnect material. |
priorityDate |
2007-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |