| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2d825814c2847d297de844b4e7c60de4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2863
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07371 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate |
2015-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6b925e118867bfb21f73cb3284b3288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20f1454ae221c1c6424cc3a3f762af4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c0de27a64309bb7884f1f41372133c5 |
| publicationDate |
2016-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101640884-B1 |
| titleOfInvention |
Probe and probe module for semiconductor inspection which have a multilayer coatings |
| abstract |
The present invention relates to a probe module for a probe card to inspect presence of a defective semiconductor chip and, more specifically, to a probe and a probe module for semiconductor inspection having multilayer coatings, with an improved allowable current to be applied to a micro integrated circuit and minimized frictional force of a contact unit with a guide. According to the present invention, the probe comprises: a main body; a coating layer; a first layer; a second layer; and a third layer. |
| priorityDate |
2015-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |