abstract |
The controllability of the composition ratio control and the controllability of the film characteristics are enhanced when the thin film is formed. A step of forming a first film containing at least a predetermined element, boron and nitrogen and having no borazine ring skeleton, and a step of forming a second film including at least a predetermined element and a borazine ring skeleton, , And a step of forming a laminated film in which the first film and the second film are laminated on the substrate. |