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filingDate 2014-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2016-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2016-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101639490-B1
titleOfInvention Semiconductor device manufacturing method, substrate processing apparatus and program
abstract The controllability of the composition ratio control and the controllability of the film characteristics are enhanced when the thin film is formed. A step of forming a first film containing at least a predetermined element, boron and nitrogen and having no borazine ring skeleton, and a step of forming a second film including at least a predetermined element and a borazine ring skeleton, , And a step of forming a laminated film in which the first film and the second film are laminated on the substrate.
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