http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101634419-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-1044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-1002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2011-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101634419-B1 |
| titleOfInvention | Liquid application device, liquid application method, and nanoimprint system |
| abstract | The liquid application device has a structure in which nozzles for performing liquid droplet ejection of a functional liquid on a substrate are aligned in a predetermined direction, and has a plurality of liquid chambers communicating with each of the nozzles, and a liquid And a piezoelectric element functioning to pressurize the liquid droplet ejection head; A relative moving unit for relatively moving the substrate and the droplet ejection head; And a droplet discharge control section that controls the operation of the piezoelectric element according to the groups by operating the piezoelectric element to discretely land the liquid on the substrate and grouping the nozzles corresponding to the structure of the droplet discharge head. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190085201-A |
| priorityDate | 2010-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 159.