http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101624484-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41733 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78678 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78669 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78618 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66765 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate | 2009-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101624484-B1 |
| titleOfInvention | Manufacturing method of transistor |
| abstract | The off current of the thin film transistor is reduced, the ON current is improved, and the variation of the electrical characteristic is reduced. A method of fabricating a reverse-staggered, channel-etched thin film transistor, the method comprising the steps of: forming a semiconductor layer including an impurity element that imparts one conductivity type exposed at a source electrode and a drain electrode, A portion of the amorphous semiconductor layer exposed by the first dry etching is removed by a second dry etching and a portion of the amorphous semiconductor layer exposed by the second dry etching is removed by plasma Thereby forming a modified layer (modified layer).n n n n Plasma, microcrystalline, TFT, slight etching, device. |
| priorityDate | 2008-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.