| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1584c21cf27f9e557aec39240422a393 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16 |
| filingDate |
2015-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_157df80a41cc0adb0b687e5cab7a1fff |
| publicationDate |
2016-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101614879-B1 |
| titleOfInvention |
Etchant composition, and method for etching a multi-layered metal film |
| abstract |
An etchant composition for use in etching a multi-metal film, the multi-metal film comprising at least one layer of a Cu or Cu-alloy and at least one layer of a Mo or Mo-alloy, wherein the etchant composition comprises From about 35 weight percent to about 70 weight percent phosphoric acid; From about 0.5% to about 8% by weight of nitric acid; About 4% to about 30% by weight acetic acid; From about 0.5 wt% to about 8 wt% of a fluorine-containing compound; And water in a remaining amount, and a method for etching a multi-metal film using the same. |
| priorityDate |
2015-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |