http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101612441-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S204-07 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D13-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-011 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 |
| filingDate | 2010-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101612441-B1 |
| titleOfInvention | Device and method to conduct an electrochemical reaction on a surface of a semiconductor substrate |
| abstract | The invention relates to an apparatus for performing an electrochemical reaction on the surface of a semiconductor substrate (S), said apparatus comprising: an electrolytic cell (10) intended to contain an electrolyte (E) A counter electrode 30 disposed in the electrolyzer 10; a light source 51 emitting a light beam; and a plurality of light sources 51 extending over the entire surface of the semiconductor substrate to activate the surface of the semiconductor substrate S Illuminating means (50) comprising means for homogenizing said light beam, and - means (50) for illuminating said semiconductor substrate (S) and said semiconductor substrate (S) to polarize the surface of said semiconductor substrate (S) And a power source (40) including a connection means for connection to an electrode. |
| priorityDate | 2009-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.