Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05647 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05624 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15788 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13016 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14643 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N25-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-08054 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1464 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14636 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-764 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14683 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 |
filingDate |
2013-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2016-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-101595623-B1 |
titleOfInvention |
A bonding pad on a back side illuminated image sensor |
abstract |
A bonding pad structure for an image sensor device and a method of manufacturing the same are disclosed. The image sensor device has a substrate and a bonding pad region including a bonding pad structure and a light irradiation sensor region having a light irradiation detection device. The bonding pad structure comprises: an interconnect layer; Interlayer dielectric layer (IDL) - both extend into the bonding pad region from below the substrate; An isolation layer formed on the IDL; A conductive pad having at least one bridging portion extending vertically from the planar portion and the planar portion to the interconnection layer through the IDL and the isolation layer; And a plurality of nonconductive stress relief structures disposed between the isolation layer and the conductive pads in a manner adjacent to the planar and bridging portions of the conductive pads to mitigate potential pulling stresses applied and to prevent conductive pad detachment. |
priorityDate |
2013-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |