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filingDate 2013-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2016-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2016-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101595623-B1
titleOfInvention A bonding pad on a back side illuminated image sensor
abstract A bonding pad structure for an image sensor device and a method of manufacturing the same are disclosed. The image sensor device has a substrate and a bonding pad region including a bonding pad structure and a light irradiation sensor region having a light irradiation detection device. The bonding pad structure comprises: an interconnect layer; Interlayer dielectric layer (IDL) - both extend into the bonding pad region from below the substrate; An isolation layer formed on the IDL; A conductive pad having at least one bridging portion extending vertically from the planar portion and the planar portion to the interconnection layer through the IDL and the isolation layer; And a plurality of nonconductive stress relief structures disposed between the isolation layer and the conductive pads in a manner adjacent to the planar and bridging portions of the conductive pads to mitigate potential pulling stresses applied and to prevent conductive pad detachment.
priorityDate 2013-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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