http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101591386-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41733 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-428 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate | 2014-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101591386-B1 |
| titleOfInvention | Method for fabricating a TFT |
| abstract | In the self-alignment process, an excessive temperature rise of the film constituting the thin film transistor is prevented at the time of excimer laser light irradiation. A diffusion preventing film 4 is formed on the substrate 2 through which the excimer laser light 16 is transmitted and a gate electrode 6 and a gate insulating film 8 are formed thereon and an oxide semiconductor layer 10 is formed thereon The excimer laser light 16 is irradiated from the substrate 2 side to the forming structure 14a to be formed and the gate electrode 6 is used as a mask to expose the gate electrode 6 in the oxide semiconductor layer 10 corresponding to the gate electrode 6 The region outside both sides of the region is irradiated with the excimer laser beam 16 to reduce the resistance. One of the two regions is used as the source region 18, and the other region is used as the drain region 19. [ The diffusion preventive film 4 is composed of a fluorinated silicon nitride film (SiN: F) containing fluorine in the silicon nitride film. |
| priorityDate | 2013-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.