http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101576033-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
filingDate | 2009-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2015-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2015-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101576033-B1 |
titleOfInvention | Precursor composition, thin film forming method, manufacturing method of gate structure using same, and manufacturing method of capacitor |
abstract | In a thin film forming precursor composition, a thin film forming method, a gate structure manufacturing method and a capacitor manufacturing method which can be used for manufacturing a semiconductor device, a precursor and an electron donating compound are brought into contact with each other to provide a stabilized precursor on a substrate After that, a reaction material capable of forming a bond with the precursor is introduced onto the substrate to form a thin film. The precursor stabilized by the electron donor compound is excellent in thermal stability and can form a thin film having excellent step coverage. The stability, efficiency and reliability of the semiconductor manufacturing process can be improved. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220028985-A |
priorityDate | 2008-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 158.