http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101575759-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-54 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-50 |
| filingDate | 2008-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101575759-B1 |
| titleOfInvention | Mask blank, an exposure mask manufacturing method, and an imprint template manufacturing method |
| abstract | The mask blank has a substrate and a thin film formed thereon and used for forming a pattern. This mask blank is constituted such that dry etching corresponding to a method of manufacturing an exposure mask is performed by patterning the thin film by dry etching using a substantially oxygen-free etching gas in which a resist pattern is formed on a thin film used as a mask. The thin film has a protective layer formed at least on the upper layer thereof and containing at least 60 atomic% of oxygen. For example, the dry etching is performed using a chlorine-based gas with little oxygen.n n n n Mask blank, patterning, exposure, etch gas. |
| priorityDate | 2007-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.