http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101573155-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-11 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67132 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2012-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101573155-B1 |
| titleOfInvention | Retention device and retention method |
| abstract | The holding apparatus 10 according to the present invention includes a first suction unit 11 for sucking a wafer (substrate) 2 from a surface to which a dicing tape (support film) 3 is adhered, (Frame portion) 4 of the wafer 2 and the dicing tape 4 on the side of the wafer 2 on which the dicing tape 3 is not bonded, A structure 14 covering the first region and a second suction portion 12 sealing the structure 14 and at least one of the dicing frame 4 and the first region. |
| priorityDate | 2011-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 84.