http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101572708-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D313-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2011-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101572708-B1 |
| titleOfInvention | Resist composition, method of forming resist pattern, novel compound, and acid generator |
| abstract | A resist composition comprising a base component (A) whose solubility in an alkali developing solution changes by the action of an acid, and an acid generator component (B) which generates an acid by exposure, The acid generator component (B) is represented by the following general formula (b1-1): wherein Y 0 represents an alkylene group or a fluorinated alkylene group having 1 to 4 carbon atoms which may have a substituent. R 0 represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group or an oxygen atom (= O). p is 0 or 1; And Z & lt ; + > represents an organic cation). [Chemical Formula 1] |
| priorityDate | 2010-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 318.