http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101563023-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2009-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101563023-B1 |
| titleOfInvention | Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method |
| abstract | The chemical mechanical polishing aqueous dispersion according to the invention (A) silica particles and (B1) as the chemical mechanical polishing aqueous dispersion containing an organic acid, wherein the (A) silica particles 29 Si-NMR from the signal area of the spectrum And the calculated number of silanol groups is 2.0 to 3.0 x 10 21 / g. |
| priorityDate | 2008-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 128.