http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101560705-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-45026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-31386 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-53048 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-4184 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00 |
| filingDate | 2008-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101560705-B1 |
| titleOfInvention | Methods and apparatus for assembling and operating electronic device manufacturing systems |
| abstract | There is provided a method for operating one or more electronic device manufacturing systems, the method comprising the steps of: 1) performing a series of electronic device manufacturing process steps using a process tool, the process tool having an effluent as a by- ≪ / RTI > 2) alleviating emissions using an abatement tool; 3) supplying an abatement resource to the abatement tool from the first abatement resource supply section; 4) changing the abatement resource supply unit from the first abatement resource supply unit to the second abatement resource supply unit, wherein the step of changing the abatement resource supply unit comprises the steps of: i) interrupting the flow of the abatement resource from the first abatement resource supply unit ); And ii) starting the flow of abatement resources from the second abatement resource supply; And 5) continuing to perform a series of process steps using the process tool while changing the abatement resource supplier and after changing the abatement resource supplier. |
| priorityDate | 2007-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
Total number of triples: 17.