http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101557778-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 2014-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101557778-B1 |
| titleOfInvention | Composition for photoresist stripper |
| abstract | The present invention relates to a photoresist stripping liquid composition, and more particularly, to a photoresist stripping liquid composition comprising two or more kinds of alkylene glycol t-butyl ether compounds and having excellent photoresist removal rate, Lt; / RTI > |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180004609-A |
| priorityDate | 2014-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 65.