| abstract |
The present invention provides a salt of formula (I).n n n Formula 1n n n n n n n n In the formula 1, Q 1 and Q 2 are each independently a fluorine atom or a C 1 -C 6 perfluoroalkyl group, T is a methylene group or a carbonyl group, R is a C 1 -C 4 alkyl group, a C 1 -C 4 alkoxy group , A hydroxyl group, a hydroxymethyl group, a cyano group, and an oxo group, and A + is an organic counter ion.n n n The present invention further provides a chemically amplified resist composition comprising a salt of the above-mentioned formula (1).n n n A resist composition, an acid generator |