http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101535200-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-18 |
| filingDate | 2011-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101535200-B1 |
| titleOfInvention | Chemical solution for forming protective film |
| abstract | The present invention relates to a method of forming a concavo-convex pattern on a surface of a concavo-convex pattern to form a concavo-convex pattern on a surface of a concavo-convex pattern of a wafer ("metallic wafer") having at least one element of titanium, tungsten, aluminum, copper, tin, tantalum, A water-repellent protective film for improving the cleaning process that is liable to lead to the formation of a water-repellent film. A chemical liquid containing a water-repellent protective film-forming agent and a solvent for forming a water-repellent protective film on at least the surface of the concavity after the cleaning step of the metal-based wafer and before the drying step, wherein the water-repellent protective film-forming agent is a compound represented by the general formula [1] Water-repellent protective film forming solution. (Wherein R 1 is a monovalent hydrocarbon group having 1 to 18 carbon atoms in which some or all hydrogen atoms may be substituted with fluorine atoms, and R 2 is independently of each other, and part or all of the hydrogen atoms are substituted with fluorine atoms A is a monovalent organic group containing a hydrocarbon group having 1 to 18 carbon atoms which may be substituted, and a is an integer of 0 to 2.) |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200136999-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102391370-B1 |
| priorityDate | 2011-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 273.