| abstract |
Of containing a base material component (A) and the acid generator component (B) that changes solubility in an alkali developing solution under action of acid, and the base material component (A) is a general formula (a0-1) [formula, R 1 is A hydrogen atom, an alkyl group or a halogenated alkyl group; R 2 is -O-, -C (= O) - , -C (= O) -O-, -OC (= O) -O-, -S-, -S (= O) 2 -, -S (= O) 2 -O-, -NH-, -NR 04 - (R 04 is an alkyl group or an acyl group), -NH-C A divalent linking group containing a polar group; And R < 3 > is a cyclic group containing a sulfonyl group in the ring skeleton]. [Chemical Formula 1] |