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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
filingDate 2014-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2015-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101530606-B1
titleOfInvention Surfactants of Sulfate and Phosphate-Based Perfluorinated Alkyl Esters and Chromium Etchant and Low Temperature Process Soaping Agent Comprising the Same
abstract A phosphate ester of perfluorinated alkyl, an anionic surfactant which is a sulfuric acid ester-based substance, and a process for producing the same. These anionic surfactants can be dispersed in various forms because they can control solid phase, liquid phase, hydrophilic phase and lipophilic phase. The anionic surfactant of the present invention can be used as a surfactant, a semiconductor cleaning agent and a low-temperature soaping agent of a chrome etching solution.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102143935-B1
priorityDate 2014-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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