http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101530044-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-305 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate | 2013-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101530044-B1 |
| titleOfInvention | Gallium precursors with aminothiolate, preparation method thereof and process for the formation of thin films using the same |
| abstract | The present invention relates to a gallium precursor represented by the following general formula (1) or (4), wherein the gallium precursor is a precursor containing sulfur and has an advantage of not requiring addition of sulfur during the manufacture of the thin film, A gallium sulfide thin film can be formed. [Chemical Formula 1] Wherein R 1 and R 2 are each independently a C 1 -C 10 linear or branched alkyl group and R 3 and R 4 are each independently a C 1 -C 10 linear or branched alkyl group or a C 1 -C 10 linear or branched X is Cl, Br or I, and n is selected from integers ranging from 1 to 3.) [Chemical Formula 4] Wherein R 1 and R 2 are each independently a C 1 -C 10 linear or branched alkyl group and R 3 and R 4 are each independently a C 1 -C 10 linear or branched alkyl group or a C 1 -C 10 linear or branched Y is SeCN or SCN, and n is selected from integers ranging from 1 to 3.) |
| priorityDate | 2013-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.