http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101526633-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C53-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C49-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate | 2008-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101526633-B1 |
| titleOfInvention | Diruthenium complex and material and method for chemical vapor deposition |
| abstract | The present invention relates to a dithronium complex such as tetra (μ-formoieto) diruthenium (II, II), tetra (μ-formoieto) (dihydrate) diuthenium (II, II) A chemical vapor phase growth material and a method for forming a ruthenium film by a chemical vapor deposition method using the same are provided. |
| priorityDate | 2008-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.