Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D333-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D327-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D339-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D333-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate |
2013-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2015-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2015-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-101508153-B1 |
titleOfInvention |
Novel sulfonium compound, photosensitive composition containing the compound and pattern-forming method using the photosensitive composition |
abstract |
The present invention relates to a photosensitive composition comprising a compound represented by the general formula (I) (Wherein R 1 to R 13 each independently represent a hydrogen atom or a substituent, and R 1 to R 13 Lt; / RTI > is a substituent containing an alcoholic hydroxyl group; Z represents a single bond or a divalent linking group; And X - represents a counter anion), and a pattern forming method using the photosensitive composition. |
priorityDate |
2006-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |