http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101502449-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-547 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 |
| filingDate | 2012-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101502449-B1 |
| titleOfInvention | Pulsed laser deposition apparatus with separated target and deposition method for multilayer thin film using of the same |
| abstract | The present invention relates to a pulsed laser deposition apparatus, which comprises a chamber in which a substrate and a deposition material are located, a target disposed inside the chamber, which supports the deposition material and rotates, and a laser is irradiated to the target portion to decompose the deposition material And a laser generator for depositing a thin film on the substrate from the decomposed deposition material, wherein the target supports two or more deposition materials, wherein the target has a physical compartment surface in accordance with the deposition material, According to the present invention, it is possible to realize a very precise multi-layered ultra thin film having a constant period by a simple operation, and a method of applying the ultra thin film is very simple. |
| priorityDate | 2012-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.