http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101480628-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2013-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101480628-B1 |
| titleOfInvention | Method for Preparing Chemically Amplified Resist Composition |
| abstract | The present invention provides a resist composition having a small lot difference between aged deterioration by a method for producing a resist composition and a method for producing the same, which enables stabilization of the resolution performance of a resist film obtained from the produced resist composition. The present invention relates to a process for producing a chemically amplified resist composition containing a binder, an acid generator, a nitrogen-containing basic substance and a solvent, comprising the steps of: selecting a solvent having a peroxide content lower than a permissible value; And a step of mixing the material for forming the chemical amplification type resist composition. |
| priorityDate | 2007-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 283.