| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f548962093d468be111a5afcea9d1c3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-584
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0682 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-584
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64 |
| filingDate |
2013-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e6b1b21c90cc723e25c86e218da4c8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a68fee2d2aea6ed5ae2d243b3eaa85a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfb86cb345b32cffce82ead439ff9bbb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20f4c081616b3f68f1a7103f1685442d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4483ab6ec8619a1ed9054a95a43aa4cd |
| publicationDate |
2015-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101479876-B1 |
| titleOfInvention |
Method of manufacturing silicon nitride powder |
| abstract |
The present invention relates to a silicon nitride powder production apparatus and a manufacturing method thereof, and more particularly, to a silicon nitride powder production apparatus and a manufacturing method which allow silicon diimide synthesis and decomposition to be performed in the same reactor. The present invention relates to a reactor comprising: a reactor body forming a reaction space therein; A raw material gas supply unit for supplying the raw material gas into the reactor so that the raw material gas has a bottom-up flow in the reaction space; A byproduct collecting unit for collecting by-products discharged from the reactor body; And a heating means for heating the silicon diimide, which is a product generated in the reactor, to a pyrolysis temperature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108928806-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108928806-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101766957-B1 |
| priorityDate |
2013-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |