http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101475133-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-963 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-547 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F1-00 |
| filingDate | 2009-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101475133-B1 |
| titleOfInvention | Sb-Te ALLOY POWDER FOR SINTERING, PROCESS FOR PRODUCTION OF THE POWDER, AND SINTERED TARGET |
| abstract | A sintered body target comprising an Sb-Te-based alloy powder for sintering and an Sb-Te-based alloy, wherein the sintered body is composed of a powder having an average particle diameter of 0.1 to 200 탆 and an oxygen content of not more than 1000 wtppm. Wherein the Sb-Te based alloy is characterized in that the resistance of the sintered body is 50 MPa or more and the relative density is 99% or more. Sb-Te-based alloy sputtering target structure is made uniform and finer, cracks are prevented from being generated in the sintered target, and arcing is prevented from occurring at the time of sputtering. Further, the unevenness of the surface due to the sputter erosion is reduced, and a Sb-Te alloy sputtering target of good quality is obtained. |
| priorityDate | 2008-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.